Русская версия
DEPARTMENT OF INDUSTRIAL AND MEDICAL ELECTRONICS
 

Power Supply for Magnetron Sputtering Systems

         
   

 Technical characteristics:

  • Average - 6 kW.
  • Output voltage (AC) - 0.1-1.2 kV.
  • Output voltage frequency - 40 kHz.
  • Output current - 0.1-10 A.
  • Output current, voltage and power stabilization mode
  • Manual and remote control (RS485/Modbus RTU).
 
         
 

Authors: Burkin E.Yu., Sviridov V.V.    Tel.: (3822) 419842

 
 

 

 

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Contacts:
For correspondence:
Tomsk Polytechnic University,
30, Lenin Avenue,
Tomsk, 634050, Russia
Institute for Non-Destructive Testing,
Industrial and Medical Electronics Department

Location:
office 319, building 16c, TPU,12, Timakov str.,Tomsk
Tel: 8 (3822) 41-96-05
Tel./Fax: 8 (3822) 41-98-69
Email: ime@tpu.
ru